FEI Helios NanoLab 460F1 FIB-SEM

Max Kruth, Doris Meertens, Karsten Tillmann

Abstract


The FEI Helios NanoLab 460F1 is a highly advanced dual beam FIB-SEM platform for imaging and analytical measurements, transmission electron microscopy (TEM) sample and atom probe (AP) needle preparation, process development and process control. For these purposes, the FEI Helios NanoLab 460F1 combines an ElstarTM UC technology electron column for high-resolution and high material contrast imaging with the high-performance TomahawkTM ion column for fast and precise sample preparation. The FEI Helios NanoLab 460F1 is additionally equipped with the MultiChemTM gas delivery system, an EasyLiftTM nanomanipulator, a cooling trap, an inert gas transfer (IGT) holder loadlock, a quick loader, a FlipStage 3TM, an EDX-System and an STEM III detector. This instrument is one of the few dual beam systems which combine an IGT holder loadlock with a FlipStage 3+TM EasyLiftTM nanomanipulator. Typical examples of use and technical specifications for the instrument are given below.

References



Cite article as: Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons (ER-C) et al. (2016). FEI Helios NanoLab 460F1 FIB-SEM. Journal of large-scale research facilities, 2, A59. http://dx.doi.org/10.17815/jlsrf-2-105




DOI: http://dx.doi.org/10.17815/jlsrf-2-105

URN: http://nbn-resolving.de/urn:nbn:de:0001-jlsrf-2-105-6

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