FEI Titan 80-300 TEM

Andreas Thust, Juri Barthel, Karsten Tillmann

Abstract


The FEI Titan 80-300 TEM is a high-resolution transmission electron microscope equipped with a field emission gun and a corrector for the spherical aberration (CS) of the imaging lens system. The instrument is designed for the investigation of a wide range of solid state phenomena taking place on the atomic scale, which requires true atomic resolution capabilities. Under optimum optical settings of the image CS-corrector (CEOS CETCOR) the point-resolution is extended up to the information limit of well below 100 pm with 200 keV and 300 keV electrons. A special piezo-stage design allows ultra-precise positioning of the specimen in all 3 dimensions. Digital images are acquired with a Gatan 2k x 2k slow-scan charged coupled device camera.

References


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Cite article as: Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons. (2016). FEI Titan 80-300 TEM. Journal of large-scale research facilities, 2, A41. http://dx.doi.org/10.17815/jlsrf-2-66




DOI: http://dx.doi.org/10.17815/jlsrf-2-66

URN: http://nbn-resolving.de/urn:nbn:de:0001-jlsrf-2-66-9

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